| 含铁聚合物薄膜的制备、结构和性能 |
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| 引用本文： | 文晓刚,周坤粦,曹伟民,张勇,刘维民. 含铁聚合物薄膜的制备、结构和性能[J]. 真空科学与技术学报, 1998, 18(2): 106-110 |
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| 作者姓名： | 文晓刚 周坤粦 曹伟民 张勇 刘维民 |
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| 作者单位： | 1. 中国科学院成都有机化学研究所,成都,610041
2. 中国科学院兰州化学物理研究所,固体润滑开放研究实验室,兰州,730000 |
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| 基金项目： | 国家自然科学基金!29374180 |
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| 摘 要： | 采用等离子体增强金属有机化合物化学气相沉积（PEMOCVD）工艺制备含铁聚合物薄膜。考察了偏压、源物加热电压对膜的沉积速率及膜中Fe的填充系数的影响。用IR，XPS，TEM和TED对膜的组成和结构进行了分析，表明薄膜具有Fe团簇镶嵌在聚合物基质中的杂混结构特征。对薄膜的光学、电学及湿敏特性进行了研究，证明膜的填充系数对膜的结构和性能都有很大的影响。该薄膜具有较好的湿敏性能。
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| 关 键 词： | 含铁聚合物薄膜 等离子体增强金属有机化合物化学气相沉积 填充系数 沉积速率 |
| 修稿时间： | 1996-11-22 |
Fe-Containing Polymer Films:Preparation, Structures and Properties |
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| Wen Xiaogang,Zhou Kunlin,Cao Weimin,Zhang Yong,Liu Weimin. Fe-Containing Polymer Films:Preparation, Structures and Properties[J]. JOurnal of Vacuum Science and Technology, 1998, 18(2): 106-110 |
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| Authors: | Wen Xiaogang Zhou Kunlin Cao Weimin Zhang Yong Liu Weimin |
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| Abstract: | Fe-containing polymer films have been prepared by plasma enhanced metal-organic chemical vapour de-postion (PEMOCVD). The influence of negative substrate bias, heating voltage of precursor on the deposition rate of films and on filling factor of Fe were discussed. The structures and stoichiometry were characterized by IR, XPS,TEM and TED. Our results demonstrate that Fe-containing polymer films consist of nano-clusters of Fe embedded in an amorphous polymer matrix. The optical, electrical and humidity-sensitivity properties of the films were the investigated. The results show that the filling factor strongly affect the structure and properties of the films. The films have good humidity-sensitivi-ty. |
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| Keywords: | Fe-containing polymer film Plasma enhanced metal-organic chemical vapour deposition Filling factor Deposition rate |
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