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光学非球面磁性复合流体抛光运动控制算法设计
引用本文:姚磊,姜晨,时陪兵,胡吉雄,严广和,张勇斌.光学非球面磁性复合流体抛光运动控制算法设计[J].光学仪器,2019,41(5):30-37.
作者姓名:姚磊  姜晨  时陪兵  胡吉雄  严广和  张勇斌
作者单位:上海理工大学机械学院,上海,200093;中国工程物理研究院机械制造工艺研究所,四川绵阳,621900
摘    要:为了实现高精度光学非球面元件超精密抛光加工的需要,设计了光学非球面磁性复合流体抛光运动控制算法。通过分析光学非球面磁性复合流体抛光加工原理,建立抛光头在加工过程中相对非球面表面的位态变换关系,采用D-H法建立抛光试验台运动学模型,求解抛光过程中抛光头位姿量,运用逆向运动学求解方法计算试验台运动量;开展工艺实验,对该运动控制算法进行验证。实验结果表明,所设计的抛光运动控制算法能够准确指导光学非球面元件抛光加工。

关 键 词:光学非球面  磁性复合流体抛光  运动控制算法  运动学建模  D-H法
收稿时间:2018/11/26 0:00:00

Design of motion control algorithm for magnetic compound fluid polishing of optical aspheric components
YAO Lei,JIANG Chen,SHI Peibing,HU Jixiong,YAN Guanghe and ZHANG Yongbin.Design of motion control algorithm for magnetic compound fluid polishing of optical aspheric components[J].Optical Instruments,2019,41(5):30-37.
Authors:YAO Lei  JIANG Chen  SHI Peibing  HU Jixiong  YAN Guanghe and ZHANG Yongbin
Affiliation:School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China,School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China,School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China,School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China,School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China and Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Mianyang 621900, China
Abstract:To meet the need of ultra-precision polishing of optical aspheric elements with high precision, the motion control algorithm is designed for magnetic compound fluid polishing of aspheric magnetic components. Optical aspheric magnetic compound fluid polishing principle is analyzed. The relation between the configuration of the polishing head and the aspheric surface is established. The D-H method is used to establish the kinematics model of the polishing test platform and the head posture during the polishing process is solved. Process experiments are carried out to verify the motion control algorithm. Experimental results show that the designed motion control algorithm can process optical aspherical elements reasonably.
Keywords:aspheric magnetic components  magnetic compound fluid polishing  motion control algorithm  kinematic modeling  D-H method
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