| 基于虚拟仪器的氦质谱检漏仪监控系统设计 |
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| 引用本文： | 李繁,黄光周,刘雄英. 基于虚拟仪器的氦质谱检漏仪监控系统设计[J]. 真空电子技术, 2007, 0(3): 20-22,51 |
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| 作者姓名： | 李繁 黄光周 刘雄英 |
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| 作者单位： | 华南理工大学,电子与信息学院,广东,广州,510640 |
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| 摘 要： | 基于虚拟仪器技术,使用LabVIEW开发平台,设计了应用于氦质谱检漏仪的监控系统。利用计算机、数据采集卡和单片机,实现了数据存储功能,达到了自动控制检漏仪部分动作的目标。该系统提高了氦质谱检漏仪的自动化水平,提高了真空系统检漏的效率。
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| 关 键 词： | 虚拟仪器技术 氦质谱检漏仪 监控系统 |
| 文章编号： | 1002-8935（2007）03-0020-03 |
| 修稿时间： | 2006-12-19 |
Design of the Monitoring System for Helium Mass-Spectrometer Leakage Detector Based on Virtual Instrument |
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| LI Fan,HUANG Guang-zhou,LIU Xiong-ying. Design of the Monitoring System for Helium Mass-Spectrometer Leakage Detector Based on Virtual Instrument[J]. Vacuum Electronics, 2007, 0(3): 20-22,51 |
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| Authors: | LI Fan HUANG Guang-zhou LIU Xiong-ying |
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| Affiliation: | School of Electronic and Information Engineering, South China University of Technology, Guangzhou 510640, China |
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| Abstract: | A monitoring system for helium mass--spectrometer leakage detector was designed in this paper. By the use of computer, data acquisition card and MCU, several functions including storing data, controlling the operation of leakage detectors in a measure automatically have been realized. The system can raise the level of automation of helium mass--spectrometer leakage detector and improve the efficiency of leakage detecting on vacuum system. |
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| Keywords: | LabVIEW |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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