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Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope |
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| Authors: | Wang Peng Behan Gavin Kirkland Angus I Nellist Peter D Cosgriff Eireann C D'Alfonso Adrian J Morgan Andrew J Allen Leslie J Hashimoto Ayako Takeguchi Masaki Mitsuishi Kazutaka Shimojo Masayuki |
| Affiliation: | a Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK b School of Physics, University of Melbourne, Parkville, Victoria 3010, Australia c Advanced Nano-characterization Center, National Institute for Materials Science (NIMS), 3-13 Sakura, Tsukuba 305-0003, Japan d High Voltage Electron Microscopy Station, NIMS, 3-13 Sakura, Tsukuba 305-0003, Japan e Quantum Dot Research Center, NIMS, 3-13 Sakura, Tsukuba 305-0003, Japan f Advanced Science Research Laboratory, Saitama Institute of Technology, 1690 Fusaiji, Fukaya 369-0293, Japan |
| Abstract: | Scanning confocal electron microscopy (SCEM) offers a mechanism for three-dimensional imaging of materials, which makes use of the reduced depth of field in an aberration-corrected transmission electron microscope. The simplest configuration of SCEM is the bright-field mode. In this paper we present experimental data and simulations showing the form of bright-field SCEM images. We show that the depth dependence of the three-dimensional image can be explained in terms of two-dimensional images formed in the detector plane. For a crystalline sample, this so-called probe image is shown to be similar to a conventional diffraction pattern. Experimental results and simulations show how the diffracted probes in this image are elongated in thicker crystals and the use of this elongation to estimate sample thickness is explored. |
| Keywords: | Three dimensional Confocal SCEM Aberration-correction |
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