Low Frictional Coating of Copper Oxide with Preferred Crystal Orientation |
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| Authors: | Goto Masahiro Kasahara Akira Oishi Tetsuo Konishi Youko Tosa Masahiro |
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| Affiliation: | (1) Materials Engineering Laboratory, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki, 305-0047, Japan;(2) Present address: Department of Chemical Engineering, University of Illinois at Urbana-Champaign, MC 712, Box C-3600, S. Matthews Ave, Urbana, IL 61801, USA |
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| Abstract: | Coating films of copper oxide were synthesized on stainless steel substrates with a r.f. magnetron sputter. The composition of the films could be controlled by changing a gas ratio of oxygen and argon in sputter plasma, which was analyzed with X-ray diffraction spectroscopy. Frictional property of the films in an atmospheric pressure and in an ultra high vacuum (UHV) was measured with a pin-on-disk vacuum tribometer. Frictional coefficients of the film as low as 0.03 and 0.05 were achieved in an atmospheric pressure and in UHV, respectively. It is therefore, expected that the films are applicable to smooth-drive movable materials for ultimate conditions such as UHV and high temperature. |
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| Keywords: | copper oxide coating magnetron sputter vacuum tribometer ultra-high vacuum |
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