平面电容传感器参数优化设计及实验

平面电容传感器的性能指标由结构参数决定,如何优化结构参数使传感器达到良好的性能是传感器设计的关键.基于三维有限元仿真模型,研究了感应面积一定的条件下,电极对数、电极宽度与间距比对传感器信号强度、灵敏度及穿透深度的影响.采用神经网络方法优化结构参数,在保证穿透深度的条件下,获得较好的信号强度.研制了不同结构参数的PCB型平面电容传感器,并将其用于介电材料检测,实验结果证明了传感器参数优化测量的有效性.

Parameters optimization design and experiments of planar capacitive sensor

The performance indexes of coplanar capacitive sensor are determined by its structure parameters.It is very important for sensor design to optimize parameters.Based on three-dimensional finite element simulation model,effect of electrode width,electrode space ration and electrode numbers on signal strength,sensitivity,penetration depth is studied.The neural network is applied to optimize structure parameters,the signal strength is improved with the enough penetration depth.The sensors with different structure parameters are fabricated on PCB for dielectric material measurement.The experiments verify the effectivity of parameters optimization measurement.