The preparation of indium phosphide layers by chloride-hydride reactions |
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Authors: | H. T. Parfitt D. S. Robertson A. R. Wilson |
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Affiliation: | (1) Royal Signals and Radar Establishment, Great Malvern, Worcestershire, UK;(2) BDH Chemicals Ltd, Poole, Dorset, UK |
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Abstract: | The preparation of indium phosphide by reactions between separate indium chlorides and phosphine is described. It is shown that the indium monochloride-phosphine reaction is the most favourable of the three possible reactions. It is demonstrated that various growth rates are possible over a range of temperatures, that good morphological layers can be obtained along with reasonable electrical characteristics. Explanations are advanced for the chemical process and the limitations on layer properties encountered. |
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