| 光电集成加速度地震检波器中声光波导相位调制器的设计与实验 |
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| 引用本文： | 张燕君,陈才和,钟娟娟,崔宇明,吴波. 光电集成加速度地震检波器中声光波导相位调制器的设计与实验[J]. 纳米技术与精密工程, 2005, 3(1): 64-67 |
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| 作者姓名： | 张燕君 陈才和 钟娟娟 崔宇明 吴波 |
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| 作者单位： | 天津大学精密仪器与光电子工程学院光电信息技术科学教育部重点实验室,天津,300072;天津大学精密仪器与光电子工程学院光电信息技术科学教育部重点实验室,天津,300072;天津大学精密仪器与光电子工程学院光电信息技术科学教育部重点实验室,天津,300072;天津大学精密仪器与光电子工程学院光电信息技术科学教育部重点实验室,天津,300072;天津大学精密仪器与光电子工程学院光电信息技术科学教育部重点实验室,天津,300072 |
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| 基金项目： | 国家自然科学基金资助项目(40274047). |
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| 摘 要： | 提出了一种新型的光电集成加速度地震检波器，这是一种全新的微光机电系统(MOEMS)，为实现硅基底上的光波导M-Z干涉仪的相位调制，采用了声光相位调制的方法，该相位调制器利用叉指换能器(IDT)激发出声表面波(SAW)实现对光波导的相位调制，在对光波导声光相位调制机理深入研究的基础上，设计并制作了器件，实验结果与理论相一致。
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| 关 键 词： | 声光相位调制 光电集成加速度计 叉指换能器 声表面波 |
| 文章编号： | 1672-6030(2005)01-0064-04 |
| 修稿时间： | 2004-10-26 |
Design and Experiment of Acousto-Optic Waveguide Phase Modulator in Electro-Optic Integrated Acceleration Seismic Geophone |
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| ZHANG Yan-jun,CHEN Cai-he,ZHONG Juan-juan,CUI Yu-ming,WU Bo. Design and Experiment of Acousto-Optic Waveguide Phase Modulator in Electro-Optic Integrated Acceleration Seismic Geophone[J]. Nanotechnology and Precision Engineering, 2005, 3(1): 64-67 |
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| Authors: | ZHANG Yan-jun CHEN Cai-he ZHONG Juan-juan CUI Yu-ming WU Bo |
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| Abstract: | A novel electro-optic integrated acceleration seismic geophone is presented in this paper. Optical waveguide M-Z interferometer and processing circuitry are monolithic integrated on the silicon substrate and it is a new kind of micro-opto-electro-mechanical system (MOEMS). In order to modulate the phase of optical waveguide M-Z interferometer on silicon substrate, the method of acousto-optic phase modulation is proposed. The acousto-optic phase modulator realizes phase modulation by passing the reference beam through a surface acoustic wave (SAW) generated on a ZnO thin-film transducer driven by an interdigital transducer (IDT). On the basis of the working theory of acousto-optic phase modulation, the device is designed and fabricated. Experimental results matches well with the theoretical prediction. |
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| Keywords: | acousto-optic phase modulation electro-optic integrated accelerometer interdigital transducer surface acoustic wave |
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