Hierarchical Three-Dimensional Layer-by-Layer Assembly of Carbon Nanotube Wafers for Integrated Nanoelectronic Devices |
| |
Authors: | Takeo Yamada Natsumi Makiomoto Atsuko Sekiguchi Yuki Yamamoto Kazufumi Kobashi Yuhei Hayamizu Yoshiki Yomogida Hiroyuki Tanaka Hisashi Shima Hiroyuki Akinaga Don N Futaba Kenji Hata |
| |
Affiliation: | Nanotube Research Center and ?Innovation Center for Advanced Nanodevices, National Institute of Advanced Industrial Science and Technology (AIST) , Tsukuba 305-8565, Japan. |
| |
Abstract: | We report a general approach to overcome the enormous obstacle of the integration of CNTs into devices by bonding single-walled carbon nanotubes (SWNTs) films to arbitrary substrates and transferring them into densified and lithographically processable "CNT wafers". Our approach allows hierarchical layer-by-layer assembly of SWNTs into organized three-dimensional structures, for example, bidirectional islands, crossbar arrays with and without contacts on Si, and flexible substrates. These organized SWNT structures can be integrated with low-power resistive random-access memory. |
| |
Keywords: | |
本文献已被 PubMed 等数据库收录! |
|