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高精度位移测量系统硬件在环仿真优化设计
引用本文:杨松,张文涛,熊显名,王献英. 高精度位移测量系统硬件在环仿真优化设计[J]. 仪器仪表用户, 2020, 0(3): 1-6
作者姓名:杨松  张文涛  熊显名  王献英
作者单位:桂林电子科技大学电子工程与自动化学院;上海微电子装备(集团)股份有限公司
基金项目:国家科技重大专项(2017ZX02101007-003)
摘    要:设计了一种基于多核DSP的高精度位移测量系统硬件在环仿真平台。本平台拥有以下优点:数值计算板卡内嵌多核DSP计算核心;多个计算核心并行处理测量模型;一块板卡同时输出多组位置信息。本平台采用了多核DSP特有的共享内存机制,从而缩短了模型内部数据通讯时间,最终缩短了单次多组测量模型的运算时间。实验结果表明,本仿真平台模型计算精度达到0.431nm,整体单次运行时间为14.242us。经优化设计后的硬件在环仿真平台模型计算精度提高了0.359nm,系统运行时间缩短了17.110us,所以该平台具有更广阔的工程应用前景。

关 键 词:多核DSP  硬件在环  精密测量  掩模台  光刻机

Optimization Design of Hardware-In-The-Loop Simulation of High Precision Displacement Measurement System
Yang Song,Zhang Wentao,Xiong Xianming,Wang Xianying. Optimization Design of Hardware-In-The-Loop Simulation of High Precision Displacement Measurement System[J]. Electronic Instrumentation Customer, 2020, 0(3): 1-6
Authors:Yang Song  Zhang Wentao  Xiong Xianming  Wang Xianying
Affiliation:(Guilin University Electronic Technology,Guangxi,Guilin,541004,China;Shanghai Micro Electronics Equipment(Group)Co.,Ltd.,Shanghai,201203,China)
Abstract:A hardware-in-the-loop simulation platform for high-precision position measurement system based on multi-core DSP is designed.The simulation platform include the following advantages:That embedded within Numerical Calculation Board was multi-core DSP;The multi-core of DSP can parallel processing measurement model;A Numerical Calculation Board realize outputting mutiple sets of data;The simulation platform can also adopted shared memory mechanism of multi-core DSP and reduced the consumption of time of data interaction within the measurement model and reduced the consumption of time of measurement model ultimately.The result show that the accuracy of measurement model is 0.431 nm and the operating time of measurement model is 14.242 us.The optimized hardware-in-the-loop simulation platform achieve that the accuracy improment of measurement model is 0.359 nm and the operating time of measurement model 17.110 us less.The optimized simulation platform is the one with wide application prospect.
Keywords:multi-core DSP  hardware-in-the-loop  high-precision position measurement  reticle stage  lthography machine
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