| 压阻式压力传感器性能的研究 |
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| 引用本文： | 阎文静,张鉴,高香梅. 压阻式压力传感器性能的研究[J]. 传感器世界, 2012, 18(2): 14-17,13 |
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| 作者姓名： | 阎文静 张鉴 高香梅 |
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| 作者单位： | 1. 合肥工业大学电子科学与应用物理学院 230009
2. 合肥工业大学 230009 |
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| 摘 要： | 微压力传感器是微机电领域最早开始研究并且实用化的器件之一,它结构简单、用途广泛。本文介绍了基于压阻效应及惠斯顿电桥的压阻式压力传感器。介绍了膜的面积、厚度、电阻形状和位置等参数对压阻式压力传感器的灵敏度和线性度的影响。
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| 关 键 词： | 微机电系统 压阻式压力传感器 弹性膜 灵敏度 线性度 |
Research on performances of piezoresistive pressure sensor |
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| YAN Wen-jing , ZHANG Jian , GAO Xiang-mei. Research on performances of piezoresistive pressure sensor[J]. Sensor World, 2012, 18(2): 14-17,13 |
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| Authors: | YAN Wen-jing ZHANG Jian GAO Xiang-mei |
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| Affiliation: | (Electronics and Applied Physics College, Hefei University of Technology, Hefei 230009, China) |
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| Abstract: | Micro-pressure sensor is the beginning of the studies and one of practical devices in MEMS. It is simple and used widely . The piezoresistive pressure sensor based on the piezoresistive effect and Wheatstone bridge is introduced in this paper. The influence of size, thickness, shape and location of the film on sensitivity and linearity of the piezoresistive pressure sensor are analyzed too |
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| Keywords: | MEMS micro piezoresistive pressure sensor diaphragm sensitivity linearity |
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