| 热电薄膜型气体流量传感器的热模拟分析 |
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| 引用本文： | 张昭勇,张昭猛,秦明,黄庆安. 热电薄膜型气体流量传感器的热模拟分析[J]. 传感器与微系统, 2002, 21(6): 15-18 |
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| 作者姓名： | 张昭勇 张昭猛 秦明 黄庆安 |
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| 作者单位： | 1. 东南大学,微电子中心,江苏,南京,210096
2. 盘锦职业技术学院,网络实验中心,辽宁,盘锦,124010 |
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| 摘 要： | 利用有限元分析工具ANSYS/FLOTRAN ,模拟并分析了一个基于薄膜结构的热电型气体流量传感器的温度场。并具体地分析了在气体流量通道入口处气体的流向角度对传感器输出信号以及气体流动状态的影响。将最终的模拟计算结果与实验数据进行比较 ,发现二者基本吻合。利用此热学模型来模拟和分析此类传感器 ,不但可以减少大量的模拟分析过程而且可以降低计算的复杂度 ,另外也为此类传感器的设计和验证提供了一个非常简单而有效的方法和依据。
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| 关 键 词： | 有限元分析 热模拟 计算流体动力学 气体流量传感器 |
| 文章编号： | 1000-9787(2002)06-0015-04 |
| 修稿时间： | 2002-01-28 |
Thermal simulation analysis of gas flow sensor based on thin-film thermopiles |
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| ZHANG Zhao yong ,ZHANG Zhao meng ,QIN Ming ,HUANG Qing an. Thermal simulation analysis of gas flow sensor based on thin-film thermopiles[J]. Transducer and Microsystem Technology, 2002, 21(6): 15-18 |
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| Authors: | ZHANG Zhao yong ZHANG Zhao meng QIN Ming HUANG Qing an |
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| Affiliation: | ZHANG Zhao yong 1,ZHANG Zhao meng 2,QIN Ming 1,HUANG Qing an 1 |
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| Abstract: | Thermal simulations and calculations of a thermal gas flow sensor based on thin film thermopiles are presented using the FEA tool ANSYS/FLOTRAN.The influences of inlet gas flow pitch angle on the sensor output and gas flowage are specifically investigated.The results of thermal simulation concerning the response of the signal voltage to variations of flow velocity at constant gas temperature are compared with experimental data.The good agreement between calculated and experimental results confirms the proposed two dimensional thermal model.The thermal model and simulation are given that provides a simple method and an effective proof for the design and verification of gas flow sensors based on thin film thermopiles. |
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| Keywords: | finite element analysis (FEA) thermal simulation computational fluid dynamics (CFD) gas flow sensors |
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