Effect of tantalum doping on the structural and optical properties of RF magnetron sputtered indium oxide thin films |
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| Affiliation: | 1. Department of Optoelectronics, University of Kerala, Thiruvananthapuram 695581, Kerala, India;2. School of Pure and Applied Physics, Mahatma Gandhi University, Priyadarsini Hills, Kottayam 686560, Kerala, India;3. UGC – DAE Consortium for Scientific Research, Khandwa Road, Indore 452017, Madhya Pradesh, India;4. Department of Physics, University College of Engineering, Panruti, Tamilnadu, India;1. Department of Energy Science, Sungkyunkwan University, Suwon 440-746, Korea;2. National Creative Research Initiative, Center for Smart Molecular Memory, Department of Chemistry, Sungkyunkwan University, 2066 Seoburo, Jangan-Gu, Suwon, Gyeonggi-Do 440-746, Korea;3. Department of Electrical Engineering (SEES), CINVESTAV-IPN, Avenida IPN 2508, San Pedro Zacatenco, Mexico D.F., Mexico;1. Instituto Politécnico Nacional, Sección de Estudios de Posgrado e Investigación, SEPI – ESIME – IPN, Av. Instituto Politécnico Nacional S/N, Col. Lindavista, México D.F. 07738, Mexico;2. Instituto Politécnico Nacional, SEPI – ESFM – IPN, Av. Instituto Politécnico Nacional S/N, Col. Lindavista, México D.F. 07738, Mexico;3. Instituto Politécnico Nacional, ESIME – IPN, Av. Instituto Politécnico Nacional S/N, Col. Lindavista, México D.F. 07738, Mexico;4. CIICAp Centro de Investigación en Ingeniería y Ciencias Aplicadas, Av. Universidad No. 1001, Col Chamilpa, Cuernavaca, Morelos, México C.P. 62209, Mexico;5. V. Lashkaryov Institute of Semiconductor Physics at NASU, Kiev, Ukraine;6. Instituto Politécnico Nacional, ESIME – Ticomán, México D.F. 07340, Mexico;1. Key Laboratory of Image Information Processing and Intelligent Control, School of Automation, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China;2. Research Group on Natural Computing, Department of Computer Science and Artificial Intelligence, University of Sevilla, Avda. Reina Mercedes s/n, 41012 Sevilla, Spain;1. Los Alamos National Laboratory, Los Alamos, NM 87544, United States;2. Argonne National Laboratory, Argonne, IL 60439, United States;3. University of Illinois, Chicago, IL 60607, United States;1. V. Lashkaryov Institute of Semiconductor Physics at NAS of Ukraine, pr. Nauki 41, C.P., 03028 Kiev, Ukraine;2. Instituto Politécnico Nacional – ESFM, Department of Physics, Av. IPN, Ed. 9, U.P.A.L.M., C.P., 07738 Mexico D.F., Mexico;3. Instituto Politécnico Nacional – ESIME Zacatenco, Av. IPN, Ed. Z4, U.P.A.L.M., 07738 Mexico D.F., Mexico |
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| Abstract: | Tantalum doped indium oxide films are prepared by RF magnetron sputtering technique and the films are annealed in air at 300 °C. The effect of Ta doping on the structural, morphological, and optical properties of the annealed films are studied using techniques like X-ray diffraction (XRD), atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM), EDX analysis, micro-Raman, UV–visible and photoluminescence spectroscopy and electrical measurements. The XRD patterns present a cubic bixbyite structure for all the films with preferred orientation along the (222) plane. The lattice constant estimation presents a reduction in lattice size with Ta doping. The W–H plot shows a tensile strain for all the films and also indicates the presence of strain induced broadening of the XRD peaks. The Raman spectra present all the characteristic modes of In2O3 cubic bixbyite phase. FESEM and AFM images show the uniform and dense distribution of smaller grains in the films. All the films show high transmittance (above 85%) in the 400–900 nm region. Electrical measurement shows a systematic increase of carrier concentration and electrical conductivity with increase in Ta doping concentration. Band gap energy increases with increase in Ta doping concentration. All the films show intense PL emission in the UV region. |
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| Keywords: | Tantalum doping in indium oxide Nanostructured films RF magnetron sputtering Micro-Raman spectra Photoluminescence emission Thickness estimation using lateral SEM images |
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