高压真空器件内绝缘击穿及老炼处理

为解决一种工作在几μs宽高压脉冲下高压真空器件的击穿问题,据其绝缘结构特点确定计算边界条件并用有限元法计算了阴极区域的电场分布;采用高压真空器件解剖、扫描电镜分析和高压脉冲耐压试验分析了高压真空器件内的真空击穿、陶瓷击穿。结果证明采取高压脉冲老炼方法对器件加固后,可减少器件的高压击穿几率,提高耐高压能力和工作可靠性。

Study on High-voltage Breakdown inside of the Vacuum Apparatus and Reinforce Solution

The electric insulation was extraordinary important for a high-voltage vacuum apparatus. In this paper, high-voltage breakdown for a high-voltage vacuum apparatus, which happened in several microseconds, was discussed in essentials. Firstly, the electric field distribution of the anode region was calculated with finite element method, and the boundary condition was chose according to the character of the vacuum apparatus structure. Subsequently, the breakdown happened inside of the high-voltage vacuum apparatus was researched initially by means of scanning electron microscope analysis and vacuum apparatus dissection. Finally, vacuum field breakdown and ceramic breakdown were researched Through the method of high-voltage plus test, and in this way, the breakdown probability of the high-voltage vacuum apparatus was decrease and the reliability of the apparatus and the ability of high-voltage endurance were increased too.