| Abstract: | An installation for magnetron sputtering of thin-film coatings has been designed to deposit getter films in extended vacuum
structures with a complex aperture. A solenoid used in the installation (diameter, 600 mm; length, 6000 mm; and maximum field,
800 G) makes it possible to deposit materials by sputtering onto internal walls in any type of vacuum chambers employed in
modern accelerators. Results of deposition of a TiZrV getter coating in narrow-aperture aluminum vacuum chambers that will
be mounted in the damping sections of a PETRA III synchrotron radiation source by DESY (Hamburg, Germany) are presented. The
atomic composition and the homogeneity of the film along its length have been investigated on a channel for SR-XRF analysis
at the Budker Institute of Nuclear Physics. |
