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Defocus modelling correction for wavelength dispersive digital compositional mapping with the electron microprobe
Authors:R B Marinenko  R L Myklebust  D S Bright  D E Newbury
Abstract:A new, simplified procedure for correcting the defocusing observed in low-magnification digital maps obtained with the electron microprobe using wavelength spectrometers is described. This procedure uses a wavelength scan of the analysed element and the geometric relationship between the specimen and the diffracting crystal to calculate a model of a standard map, which is subsequently used in the quantification of each pixel of the unknown map. The results of this new procedure are compared with the earlier method of using an experimentally obtained standard map.
Keywords:Compositional mapping  microanalysis  image processing electron microprobe  wavelength spectrometers
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