长春光机所软X射线-极紫外波段光学研究

综述了我所软X射线-极紫外波段关键技术的研究进展。描述了软X射线-极紫外波段光源技术,研制了工作波段为6~22 nm的微流靶激光等离子体光源;介绍了光子计数成像探测器技术,研制出了有效直径为25 mm,等效像元分辨率为0.3 mm的极紫外波段探测器;开展了超光滑表面加工、检测技术的研究,研制了超光滑表面抛光机,加工出高面形精度的超光滑表面,面形精度为6 nm(RMS值),表面粗糙度达0.6 nm(RMS值);进行了软X射线-极紫外波段多层膜技术的研究,研制出13 nm处反射率为60%的多层膜反射镜,150 mm口径反射镜的反射率均匀性优于±2.5%;最后,讨论了软X射线-极紫外波段测量技术研究,研制出该波段反射率计,其测量范围为5~50 nm,光谱分辨率好于0.2 nm,测量重复性好于±1%。在上述关键技术研究基础上,研制出了极紫外波段成像仪和空间极紫外波段太阳望远镜,这些仪器在我国空间科学研究项目中发挥了作用。

Soft X-ray and extreme ultraviolet optics in CIOMP

Some key technologies on soft X-ray and Extreme Ultraviolet (EUV) optics developed at CIOMP are reviewed in this paper. The technology for laser-produced plasma sources is described and a laser-produced plasma source with a liquid target worked at wavelength range of 6~22 nm has been developed. Soft X-ray and EUV photon-counting imaging is introduced and a two-dimensional photon-counting detector with position sensitive anode is fabricated. The active area of the detector is 25 mm in diameter and the resolution is 0.3 mm. The technology of super-smooth mirror fabrication is studied and a polishing machine has been developed to fabricate the super-smooth surface mirrors with the roughness and the figure of 0.6 nm (RMS) and 6 nm (RMS),respectively. Soft X-ray and EUV multilayer film technologies are coverd also in the paper and a number of mutilayer coating mirrors have been deposited for some space science projects. These multilayer mirrors show their reflectivity of 60% at 13 nm and the uniformity better than ±2.5% across a 150 mm diameter. The soft X-ray and EUV radiometric technologies are studied and a reflectometer, with operational wavelength range of 5~50 nm, spectrum resolution of 0.2 nm and repeatability better than 1% has been set up. Based on a cutting-edge technology, an EUV imager and a space EUV solar telescope are developed,these imaging instruments have played an important role in a number of scientific projects.