热轧变形量对半导体用NiCr溅射靶组织和磁性能的影响

分析了半导体用NiCr溅射靶受到热轧作用后发生的组织与磁性能的变化,研究了不同的NiCr合金显微组织结构对其磁性产生的影响及两者间的相互作用.研究结果表明:在NiCr合金中存在大量FCC晶单相镍基固溶体,逐渐增大热轧变形量后,其形成了宽度更大的衍射峰.当热轧变形量提高后,(100)晶面发生了择优取向,取向度先增大、再降...

Influence of hot rolling deformation on microstructure and magnetic properties of NiCr sputtering target for semiconductor

The changes of microstructure and magnetic properties of NiCr sputtering targets for semiconductor after hot rolling were analyzed,and the influences of different microstructures for NiCr alloys on their magnetic properties and the interaction between them were studied. The results show that there are many FCC single-phase nickel-based solid solutions in NiCr alloy,and the diffraction peaks with larger width are formed after the deformation amount of hot rolling is gradually increased. When the deformation amount of hot rolling increases,the preferred orientation of crystal surface(100) first increases and then decreases,while the orientation of other crystal surfaces remains basically unchanged. Before hot rolling,without dislocation is formed in NiCr alloy matrix,and the BSE characterization test of each hot rolling structure indicates that finer grains are formed in NiCr alloy. In the central region of hysteresis loop,more closed areas of hysteresis loop are formed after hot rolling treatment,and the coercivity and residual magnetic induction intensity are significantly enhanced. Thus,at the hot rolling stage,a constant saturation magnetic induction intensity is formed,and the alloy gains greater coercivity after increasing the deformation degree of hot rolling.