| 低能电子点源显微镜的研制及初步实验结果 |
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| 引用本文： | 柏鑫,肖桂里,于洁,张兆祥,郭等柱,赵兴钰,薛增泉,张耿民. 低能电子点源显微镜的研制及初步实验结果[J]. 现代科学仪器, 2006, 16(5): 49-52 |
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| 作者姓名： | 柏鑫 肖桂里 于洁 张兆祥 郭等柱 赵兴钰 薛增泉 张耿民 |
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| 作者单位： | 1. 北京大学信息科学技术学院电子学系,纳米器件物理与化学教育部重点实验室,北京,100871
2. 北京普莱思科技有限责任公司 |
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| 摘 要： | 研制了一台集低能电子点源显微镜和场发射显微镜于一体的设备。研制的过程中，解决了包括超高真空的获得，外界振动的隔离，爬行器及其控制电路的设计，场发射电流-电压自动测量，超高真空换样等一系列问题。利用该设备，获得了放大倍数大于10^4的投影像，并且测量了单根多壁碳纳米管的场发射特性。
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| 关 键 词： | 低能电子点源显微镜 场发射显微镜 场发射特性 |
| 收稿时间： | 2006-07-10 |
| 修稿时间： | 2006-07-10 |
Development of a Low-Energy Electron Point Source Microscope and Some Initial Experimental Results on It |
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| Bai Xin,Xiao GuiLi,Yu Jie,Zhang ZhaoXiang,Guo DengZhu,Zhao XingYu,Xue ZengQuan,Zhang GengMin. Development of a Low-Energy Electron Point Source Microscope and Some Initial Experimental Results on It[J]. Modern Scientific Instruments, 2006, 16(5): 49-52 |
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| Authors: | Bai Xin Xiao GuiLi Yu Jie Zhang ZhaoXiang Guo DengZhu Zhao XingYu Xue ZengQuan Zhang GengMin |
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| Abstract: | A facility has been developed that can function as a low-energy electron point source(LEEPS) microscope or a field-emission microscope(FEM).During the development,the following problems were tackled: the obtainment of ultrahigh vacuum(UHV),the isolation of external vibration,the design of the inch-worm and its controlling circuit,automatic measure-ment of the curves of field emission current versus applied voltage(I-V curves) and sample transfer in UHV,etc.In the initial run,projection images with a magnification larger than 104 were achieved and I-V curves of a multiwalled carbon nanotube(MWCNT) were also acquired. |
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| Keywords: | LEEPS FEM field emission properties |
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