静电计检测微位移的原理和实验

该文叙述一种电容式微位移静电计测量方法。该方法中，静电计测量的可变电容两电极问电位差可直接转换为位移，其原理，最终公式和测试电路相当简单，而分辨率，预期能达到nm量级。用静电计—平行板电容测量装置对振动或冲击引起的微位移进行测量的实验结果验证了上述结论。

The principle and experiments of the micro-displacement measurement using an electrometer

A capacitance method using an electrometer to measure micro-displacement was reported in this paper. In this method, the potential difference between the both plates of the capacitor with a moveable plate can be directly transformed into the moveable plate＇ s displacement. The principle, the finale equation and the measuement circuit are all quite simple, while the measurement resolution can be expected to nm. These judgments were proved by experiments in which an equipment consists of an electrometer and a plate capacitor with a moveable plate was used to measure the micro-displacement of the moveable plate stimulated by a vibrator or by a shock.