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扫描电化学池显微镜阿基米德螺旋快速扫描方法的研究
引用本文:庄健,高丙立,王志武,廖晓波,闫衡. 扫描电化学池显微镜阿基米德螺旋快速扫描方法的研究[J]. 仪器仪表学报, 2019, 40(12): 175-184
作者姓名:庄健  高丙立  王志武  廖晓波  闫衡
作者单位:西安交通大学机械工程学院西安710049;西安交通大学机械工程学院西安710049;西南科技大学制造科学与工程学院 制造过程测试技术教育部重点实验室绵阳621010
基金项目:国家自然科学基金面上项目(51375363)、陕西省科技厅工业公关项目(2013GY2 04)、中央高校基本科研业务费专项资金资助项目(Z201707084)资助
摘    要:针对现有扫描电化学池显微镜(scanning electrochemical cell microscopy, SECCM)的扫描方法在扫描成像快速性上的不足,提出一种基于阿基米德螺旋线的新型SECCM快速扫描方法。传统跳跃扫描模式的跳跃高度是在没有先验知识的情况下靠人工经验设定的,为了避免碰撞其取值往往偏大,因此设置的扫描行程越长,消耗时间越久,速度慢、效率低。利用螺旋线轨迹预扫描快速获得待测平面的最高点,进而有效地降低了传统跳跃模式的跳跃行程,大幅提高了SECCM的扫描成像速度。此外,以螺旋线轨迹高速运动来检测最高点时,轨迹具有无冲击、因此样本运动过程无偏移,该扫描方法具有成像稳定性高的优点。通过带状金属表面成像实验表明,相对于传统跳跃扫描模式,阿基米德螺旋扫描方法在保证成像质量的同时扫描速度提高了约110%。可见提出的方法对提升SECCM扫描速度和成像质量有着重要的意义。

关 键 词:扫描电化学池显微镜;跳跃扫描模式;三维形貌测量

Study on the Archimedes spiral rapid scanning method for scanning electrochemical cell microscope
Zhuang Jian,Gao Bingli,Wang Zhiwu,Liao Xiaobo,Yan Heng. Study on the Archimedes spiral rapid scanning method for scanning electrochemical cell microscope[J]. Chinese Journal of Scientific Instrument, 2019, 40(12): 175-184
Authors:Zhuang Jian  Gao Bingli  Wang Zhiwu  Liao Xiaobo  Yan Heng
Abstract:To address the slow imaging speed of scanning electrochemical cell microscopy (SECCM), a new scanning method based on Archimedean spiral is proposed. The probe height of conventional hopping mode is set by experience without any prior knowledge. To avoid collision, the value of the hopping height is often large. Therefore, the long scanning trajectory may lead to long scanning time and low imaging efficiency. Archimedes spiral based pre scanning is used to obtain the highest point of the plane. This method can effectively reduce the hopping height of the scanning process. Then, the SECCM scanning speed is improved. Moreover, due to the continuous and smooth trajectory of the Archimedes spiral, no impact and no sample deviation occur in the scanning process. It has the advantage of high stability. Compared with the traditional hopping mode, experiments on imaging the metal surface show that the proposed method can improve the scanning speed by 110%. Meanwhile, the imaging quality can be guaranteed. The proposed method is of great significance to improve SECCM imaging speed and quality.
Keywords:scanning electrochemical cell microscopy   hopping scanning mode   three dimensional topography measurement
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