| 晶体硅太阳电池钝化工艺的研究 |
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| 引用本文： | 周良德,林安中,王学建. 晶体硅太阳电池钝化工艺的研究[J]. 太阳能学报, 1999, 20(1): 74-77 |
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| 作者姓名： | 周良德 林安中 王学建 |
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| 作者单位： | 北京有色金属研究总院,北京,100088 |
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| 摘 要： | 采用热氧化法在多晶硅及单硅大面积太阳电池上生长二氧化硅钝化膜,结合丝网印刷制电极及二氧化钛减反射膜工艺,使太阳电池的扩散长度及效率得到改进。也进行了在多晶硅太阳电池上采用等离子沉积法制作氮化硅减反射膜的研究。
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| 关 键 词： | 钝化膜 晶体硅 太阳电池 丝网印刷法 |
PASSIVATION PROCESSES OF CRYSTALLINE SILICON SOLAR CELL |
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| Zhou Liangde,Lin Anzhong,Wang Xuejian. PASSIVATION PROCESSES OF CRYSTALLINE SILICON SOLAR CELL[J]. Acta Energiae Solaris Sinica, 1999, 20(1): 74-77 |
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| Authors: | Zhou Liangde Lin Anzhong Wang Xuejian |
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| Abstract: | The method of thermal oxidation was used to deposit SiO 2 film for passivation of single and polycrystalline solar cells that was combined with the process of screen printing of contact and antireflection coating of TiO x.The improvement of diffusion length and cell efficiency was found.The research also carried out for plasma enhanced CVD of Si 3N 4 film for antireflection coating. |
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| Keywords: | passivating film crystalline silicon solar cell silicon nitride film screen printing |
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