| 真空阴极电弧沉积TiN装饰膜工艺与应用研究 |
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| 引用本文： | 袁镇海 戴达煌. 真空阴极电弧沉积TiN装饰膜工艺与应用研究[J]. 广东有色金属学报, 1992, 2(2): 133-139 |
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| 作者姓名： | 袁镇海 戴达煌 |
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| 作者单位： | 广州有色金属研究院 广州(510651) |
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| 摘 要： | 本文研究了真空阴极电弧沉积 TiN 装饰膜的工艺及其应用.利用 X 射线衍射、扫描电镜等方法,分析了膜层性能与沉积工艺之间的关系,结果表明:(1)适当增大气氛压力,可减少 Ti 液滴,从而提高了膜层的显微硬度和耐腐蚀性能;(2)膜层颜色与负偏压和氮分压有关.本文报导了工艺参数对膜层织构和品格畸变的影响.本文还对表壳、表带、餐具.陶瓷制品仿金镀等应用问题进行了讨论.
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| 关 键 词： | 阴极电弧沉积 氮化钛 装饰膜 |
THE PROCESS AND APPLICATION OF TiN DECORATIVE FILMS FORMED BY VACUUM CATHODIC ARC DEPOSITION |
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| YUAN Zhenhai DAI Dahuang LUO Guangzhou Research Institute of Non-Ferrous Metals,Guangzhou. THE PROCESS AND APPLICATION OF TiN DECORATIVE FILMS FORMED BY VACUUM CATHODIC ARC DEPOSITION[J]. Journal of Guangdong Non-Ferrous Metals, 1992, 2(2): 133-139 |
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| Authors: | YUAN Zhenhai DAI Dahuang LUO Guangzhou Research Institute of Non-Ferrous Metals Guangzhou |
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| Affiliation: | YUAN Zhenhai DAI Dahuang LUO Guangzhou Research Institute of Non-Ferrous Metals,Guangzhou 510651 |
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| Abstract: | In this paper,the process and application of TiN decorative films formed by vacuum cathodic are deposition are investigated.The relation between pro- perties of TiN films and deposition technology are also analyzed using X-ray dif- fraction, scanning electron microscope,etc.Results show that (1) When the atmosphe- tic pressure was properly raised,droplets Were reduced in size and amount;therefore, both microhardness and corrosion resistance of the films were improved; (2) The color of the films had relations to negative bias and N_2 pressure.Moreover,influence of technological parameters on the texture and the lattice distortion are reported and the application of decorative films to watchcases,watchbands,tableware and ceramics are discussed. |
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| Keywords: | cathodic arc deposition titanium nitride decorative films |
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