基于LabVIEW的高精度激光干涉测距系统

微位移和直线度误差作为工业测量中重要的几何参数,其测量值对精密仪器的制造与检测有着广泛应用.但随着工业技术发展,就传统测量仪器自准直仪而言,存在精度不高、实时性不强、速度慢等缺点,无法完全满足当下高速、高精度、实时监测的的要求,提出一种基于LabVIEW 的高精度激光干涉测距系统,对位移位置和直线度进行测量与分析.基于双频激光干涉测距原理,设计了光电测距仪测量得到带位移信号的光信号,经光电转换得到电信号,利用LabVIEW 平台编写操作界面和数据处理与误差分析.对系统进行实验,表明对长度30cm 导轨检测,相对误差小于0.2nm,系统具有结构简单、测量速度快、实时性强等优点,实现了位移与直线度的大范围、高精度的测量,可被在工业位移测量中广泛使用.

High precision laser interferometric displacement measurement system based on LabVIEW

Micro-displacement and straightness error as an important measurement of industrial geometric parameters, the measurement of precision instruments for manufacturing and testing has a wide range of applications.However, with the development of industrial technology, there are some shortcomings such as low accuracy, real-time performance and slow speed, which can not meet the requirement of high-speed, high-precision and real-time monitoring of traditional measuring instrument collimator.A high precision laser interferometer system based on LabVIEW is used to measure and analyze the displacement position and straightness.Based on the principle of dual-frequency laser interferometry, the optical signal with displacement signal is designed and the electric signal is obtained by photoelectric conversion.The user interface and data processing and error analysis are written by LabVIEW.The system has the advantages of simple structure, fast measurement speed and strong real-time performance.It can realize large-range and high-precision measurement of displacement and straightness, and can be measured by the system.It can be widely used in industrial displacement measurement.