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Structural and Mechanical Analysis of APCVD Deposited Diamond-Like Carbon Thin Films |
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| Authors: | Ghadai Ranjan Kumar Das Soham Kalita Kanak Swain Bibhu Prasad Davim João Paulo |
| Affiliation: | 1.Department of Mechanical Engineering, Sikkim Manipal Institute of Technology, Sikkim Manipal University, Gangtok, Sikkim, 737136, India ;2.Department of Mechanical Engineering, Vel Tech Rangarajan Dr. Sagunthala R&D Institute of Science and Technology, Avadi, Chennai, 600062, India ;3.Department of Physics, National Institute of Technology, Manipur, 795004, India ;4.Department of Mechanical Engineering, University of Aveiro, 3810 193, Campus Santiago, Portugal ; |
| Abstract: | Silicon - In this study, diamond-like Carbon (DLC) thin film coatings are deposited by atmospheric pressure chemical vapour deposition (APCVD) process by using C2H2 and H2 as precursor gases on... |
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