| 金刚石刀具刃口轮廓新型检测方法与技术 |
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| 引用本文： | 孙涛,董申. 金刚石刀具刃口轮廓新型检测方法与技术[J]. 制造技术与机床, 2002, 0(8): 39-41 |
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| 作者姓名： | 孙涛 董申 |
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| 作者单位： | 哈尔滨工业大学 |
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| 基金项目： | 国家自然科学重点基金项目“微纳米加工表层形成机理及相关技术基础”(项目编号 :598351 80 )资助 |
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| 摘 要： | 研究了原子力显微镜扫描方式及原子力微探针坐标方式的刃口轮廓测量技术。原子力探针新型检测方法与技术可以在亚微米尺度内很好地克服传统测量方法精确度低的缺点，而且操作简便，为目前超精密加工领域中金刚石刀具研磨技术水平的提高提供了有利的技术手段。
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| 关 键 词： | 检测方法 金刚石刀具 刃口轮廓 原子力显微镜 |
| 修稿时间： | 2000-12-28 |
A New Measuring Method and Technology for Diamond Tool Edge Profile |
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| SUN Tao,et al.. A New Measuring Method and Technology for Diamond Tool Edge Profile[J]. Manufacturing Technology & Machine Tool, 2002, 0(8): 39-41 |
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| Authors: | SUN Tao et al. |
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| Affiliation: | Harbin Institute of Technology |
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| Abstract: | s:AFM scanning measurement technology and atomic force micro-probe coordinate measurement technology for edge profile is studied. This new measuring technology can efficiently resolve the shortage of low accuracy of traditional measuring method in sub-micrometer level and is easy to operate, it offers a strong technical means for improving the grinding technology level of diamond tool in ultra-precision machining field. |
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| Keywords: | Diamond Tool Edge Profile Atomic Force Microscope |
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