| 塑料ITO膜磁控溅射卷绕镀膜机的研制 |
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| 引用本文： | 李宪华. 塑料ITO膜磁控溅射卷绕镀膜机的研制[J]. 真空, 2000, 0(6): 38-39 |
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| 作者姓名： | 李宪华 |
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| 作者单位： | 兰州真空设备有限责任公司!甘肃兰州730050 |
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| 摘 要： | 本文介绍了塑料 ITO膜磁控溅射卷绕镀膜机的研制 ,就采用磁控溅射卷绕法制备 ITO膜的设备及成膜过程的一些工艺问题进行了探讨
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| 关 键 词： | 塑料ITO膜 磁控溅射 卷绕 工艺探讨 |
Research on Magnetron Sputtering Winding Coating Equipment for Use in Plastic ITO Films |
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| LI Xian hua,ZHANG Wen gang,ZHENG Xin. Research on Magnetron Sputtering Winding Coating Equipment for Use in Plastic ITO Films[J]. Vacuum(China), 2000, 0(6): 38-39 |
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| Authors: | LI Xian hua ZHANG Wen gang ZHENG Xin |
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| Abstract: | This article mainly introduces the research on magnetron sputtering winding coating equipment for use in plastic ITO films,. It is studied that problems about its forming process and equipment of ITO films produced by magnetron sputtering winding method. |
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| Keywords: | plastic ITO films magnetron sputtering winding discuss ion on forming process |
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