Monolithic modelling of electro‐mechanical coupling in micro‐structures

The purpose of the present work is to model and to simulate the coupling between the electric and mechanical fields. A new finite element approach is proposed to model strong electro‐mechanical coupling in micro‐structures with capacitive effect. The proposed approach is based on a monolithic formulation: the electric and the mechanical fields are solved simultaneously in the same formulation. This method provides a tangent stiffness matrix for the total coupled problem which allows to determine accurately the pull‐in voltage and the natural frequency of electro‐mechanical systems such as MEMs. To illustrate the methodology results are shown for the analysis of a micro‐bridge. Copyright © 2005 John Wiley & Sons, Ltd.