| 电子级磷酸工业化战略及其配套技术 |
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| 引用本文： | 殷宪国.电子级磷酸工业化战略及其配套技术[J].硫磷设计与粉体工程,2010(2):15-19. |
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| 作者姓名： | 殷宪国 |
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| 作者单位： | 武汉工程大学研究设计院,湖北武汉,430074 |
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| 摘 要： | 为了适应半导体芯片、液晶制造业向中国转移,半导体芯片和集成电路微细加工、薄膜—液晶制造工艺需要的电子级磷酸包括MOS级、BV级万吨规模工业化装置正在各地建设。提出了发展我国电子级磷酸的工业化战略,并提出了与电子级磷酸制备工艺相关的配套技术开发意见和建议。
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| 关 键 词： | 磷酸+电子级 电子化学品 工业化战略 技术 |
Industrialization Strategy and Associated Technology for Electronic Grade Phosphoric Acid |
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| YIN Xian-guo.Industrialization Strategy and Associated Technology for Electronic Grade Phosphoric Acid[J].Sulphur Phosphorus & Bulk Materials Handling Related Engineering,2010(2):15-19. |
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| Authors: | YIN Xian-guo |
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| Affiliation: | Research and Design Institute of Wuhan Institute of Technology/a>;Wuhan 430074/a>;China |
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| Abstract: | To tailor to the shift of semiconductor chip and LCD production to China,10 kt/a industrial plants for electronic grade phosphoric acid,including MOS grade and BV grade,which are required in the production of semiconductor chip and integrated circuit micro-processing,and membrane-LCD,are under construction in China.The industrialization strategy for the development of electronic grade phosphoric acid in China is outlined,and comments and suggestions are given for the development of associated technologies f... |
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| Keywords: | phosphoric acid + electronic grade electronic chemical industrialization strategy technology |
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