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旋转载体用硅微机械陀螺的相位研究
引用本文:王领,张金科,张福学. 旋转载体用硅微机械陀螺的相位研究[J]. 微纳电子技术, 2007, 44(7): 427-429,437
作者姓名:王领  张金科  张福学
作者单位:北京信息工程学院传感技术研究中心,北京市传感器重点实验室,北京,100101
基金项目:国家自然科学基金;北京市重点实验室基金
摘    要:介绍了利用旋转载体自身旋转作为驱动力的硅微机械陀螺的相位提取技术。当陀螺的敏感轴平行于载体偏转平面时,硅摆所受的哥氏力最大,输出为正弦信号的峰值;当它的敏感轴和偏转平面垂直时,输出为正弦信号的零值。因此,以载体的自转信号为基准,通过比较输出信号波峰在输入基准坐标中相位的变化可知敏感轴的方向,进而能够确定旋转平面及载体在空间中的偏转方向。

关 键 词:旋转载体  硅微机械  陀螺仪  相位
文章编号:1671-4776(2007)07/08-0427-03
修稿时间:2007-05-23

Phase Research of Silicon Micromachined Gyroscope Used for Rotating Carrier
WANG Ling,ZHANG Jin-ke,ZHANG Fu-xue. Phase Research of Silicon Micromachined Gyroscope Used for Rotating Carrier[J]. Micronanoelectronic Technology, 2007, 44(7): 427-429,437
Authors:WANG Ling  ZHANG Jin-ke  ZHANG Fu-xue
Affiliation:Beij ing Key Lab. of Sensor, Research Center of Sensor Technology, Beij ing Institute of Information Engineering, Beijing 100101, China
Abstract:The phase picking up technique of silicon micromachined gyroscope used for rotating carrier was proposed. When the sensitivity axes parallel to the deflexion plan, silicon pendulum will get the biggest Coriolis force, and the outputs are the peak value of the sine wave, when the sensitivity axes perpenticularity to the deflexion plan, the outputs are the zero value of the sine wave. Taking the input signal of the gyroscope as the benchmark, the orientation of the sensitivi- ty axis by comparing the output signal phase in benchmark coordinate will be observed, and the circumrotating plan and the deflexion orientation of rotating carrier in the space can be confirmed.
Keywords:rotating carrier   silicon micromachined   gyroscope   phase
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