A 16-channel capacitance-to-period converter for capacitive sensor applications

An electronic system able to read out arrays of up to sixteen different capacitive type sensors is presented. The output signal of the readout is a square wave signal, with oscillation period linearly modulated by the respective sensor capacitance under measurement. Components such as charge/discharge current control unit, a multiplexing unit and a bandgap voltage reference are integrated on chip, to obtain a stable and linear readout system for multiple sensors of variable types and capacitance ranges. The ASIC was designed and fabricated in AMS 0.35???m CMOS technology and was hosted on a PCB together with a supervising microcontroller, which is programmed to produce ratiometric measurements using reference capacitances to minimise parasitic effects. Finally, a USB interface undertakes the task of communicating the results to a personal computer. Characterization of the system was performed using (a) discrete capacitances and (b) capacitive pressure sensors. The system was evaluated in a capacitance range of 10?C140?pF exhibiting high linearity (r?=?0.9954) with sensitivity of 0.062???s/pF when tested using in-house made capacitive pressure sensors.