| Synthesis and Characterization of SiCOF/a-C∶F Double-Layer Films with Low Dielectric Constant for Copper Interconnects |
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| 引用本文： | Zhang Wei,Zhu Lian,Sun Qingqing,Lu Hongliang,Ding Shijin. Synthesis and Characterization of SiCOF/a-C∶F Double-Layer Films with Low Dielectric Constant for Copper Interconnects[J]. 半导体学报, 2006, 27(3): 429-433 |
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| 作者姓名： | Zhang Wei Zhu Lian Sun Qingqing Lu Hongliang Ding Shijin |
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| 作者单位： | 复旦大学微电子学系，上海 200433;复旦大学微电子学系，上海 200434;复旦大学微电子学系，上海 200435;复旦大学微电子学系，上海 200436;复旦大学微电子学系，上海 200437 |
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| 基金项目： | 中国科学院资助项目 , 上海市先进材料研究发展基金 |
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| 摘 要： | 用等离子体化学气相淀积系统制备了一种新颖的SiCOF/a-C:F双层低介电常数介质薄膜,并用红外光谱表征了该薄膜的化学结构.通过测量介质的折射率发现该薄膜长时间暴露在空气中,其光频介电常数几乎不变.然而,随退火温度的增加,其光频介电常数则会减小.基于实验结果讨论了几种可能的机理.二次离子质谱分析表明在Al/a-C:F/Si结构中F和C很容易扩散到Al中,但在Al/SiCOF/a-C:F/Si结构中,则没有发现C的扩散,说明SiCOF充当了C扩散的阻挡层.分析还发现在SiCOF和a-C:F之间没有明显的界面层.
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| 关 键 词： | 低介电常数介质 FTIRSIMS low dielectric constant material FTIR SIMS 铜互连 低介电常数 膜的制备 表征 Characterization Synthesis Interconnects Copper Low Dielectric Constant barrier carbon aluminum layer films recognizable addition difference annealing causes rapid |
| 文章编号： | 0253-4177(2006)03-0429-05 |
| 收稿时间： | 2005-11-10 |
| 修稿时间： | 2005-11-10 |
Synthesis and Characterization of SiCOF/a-C : F Double-Layer Films with Low Dielectric Constant for Copper Interconnects |
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| Zhang Wei,Zhu Lian,Sun Qingqing,Lu Hongliang and Ding Shijin. Synthesis and Characterization of SiCOF/a-C : F Double-Layer Films with Low Dielectric Constant for Copper Interconnects[J]. Chinese Journal of Semiconductors, 2006, 27(3): 429-433 |
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| Authors: | Zhang Wei Zhu Lian Sun Qingqing Lu Hongliang Ding Shijin |
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| Affiliation: | Department of Microelectronics,Fudan University,Shanghai 200433,China;Department of Microelectronics,Fudan University,Shanghai 200434,China;Department of Microelectronics,Fudan University,Shanghai 200435,China;Department of Microelectronics,Fudan University,Shanghai 200436,China;Department of Microelectronics,Fudan University,Shanghai 200437,China |
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| Abstract: | |
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| Keywords: | low dielectric constant material FTIR SIMS |
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