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SiC长纤维表面(Al+Al_2O_3)复合涂层的制备
引用本文:张露,石南林,宫骏,裴志亮,高立军,孙超. SiC长纤维表面(Al+Al_2O_3)复合涂层的制备[J]. 金属学报, 2011, 0(4)
作者姓名:张露  石南林  宫骏  裴志亮  高立军  孙超
作者单位:中国科学院金属研究所;
摘    要:利用反应磁控溅射法在SiC长纤维表面沉积了(Al+Al_2O_3)扩散阻挡涂层,研究了沉积工艺参数对涂层的成分、沉积速率的影响,以及涂层对SiC纤维的表面残余应力及力学性能的影响.结果表明,随着溅射功率的增加,Al_2O_3涂层的沉积速率先迅速增加后缓慢增加;随着工作气压的增加,Al_2O_3涂层的沉积速率先缓慢降低,在工作气压到达一定值时,沉积速率快速下降随后缓慢下降.沉积的(Al+Al_2O_3)复合涂层保护了SiC纤维的富C层,起到了保证纤维与Al_2O_3涂层之间结合力的作用;激光Raman谱显示改性后纤维的表面残余应力有降低趋势.室温和高温处理后复合丝的拉伸强度分别是计算值的97.69%和98.77%,涂层对纤维的力学性能影响很小.

关 键 词:SiC纤维  反应磁控溅射  扩散阻挡层  复合涂层  残余应力  

PREPARATION OF COMPOSITE COATING(Al+Al_2O_3) ON SiC LONG FIBER
ZHANG Lu,SHI Nanlin,GONG Jun,PEI Zhiliang,GAO Lijun,SUN Chao Institute of Metal Research,Chinese Academy of Sciences,Shenyang. PREPARATION OF COMPOSITE COATING(Al+Al_2O_3) ON SiC LONG FIBER[J]. Acta Metallurgica Sinica, 2011, 0(4)
Authors:ZHANG Lu  SHI Nanlin  GONG Jun  PEI Zhiliang  GAO Lijun  SUN Chao Institute of Metal Research  Chinese Academy of Sciences  Shenyang
Affiliation:ZHANG Lu,SHI Nanlin,GONG Jun,PEI Zhiliang,GAO Lijun,SUN Chao Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016
Abstract:Reactive magnetron sputtering was used to prepare(Al+Al_2O_3) diffusion barrier layer on SiC fiber surface.The relationships between deposition process parameters with composition and deposition rate of the coating,and the influence of the coating on mechanical property of SiC fiber were measured.Results show that with increasing sputtering power,the deposition rate increases rapidly at first and then slowly.With increasing of working pressure,the deposition rate of the coating deceases slowly at first,and ...
Keywords:SiC fiber  reactive magnetron sputtering  diffusion barrier layer  composite coating  residual stress  
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