| 金刚石镀氧化钇增透膜系的设计与研究 |
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| 引用本文： | 刘其军,刘正堂,闫锋.金刚石镀氧化钇增透膜系的设计与研究[J].电镀与涂饰,2009,28(12). |
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| 作者姓名： | 刘其军 刘正堂 闫锋 |
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| 作者单位： | 西北工业大学材料学院,陕西,西安,710072 |
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| 基金项目： | 航空科学基金，教育部博士点基金，西北工业大学基础研究基金 |
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| 摘 要： | 为了提高金刚石的红外透过率,根据光干涉膜基础理论对薄膜增透进行了设计,获得了增透膜系的相关参数,并采用非规整设计中的彻底搜索法对所设计的膜系进行了增透效果分析.结果表明,在金刚石衬底上单面和双面镀Y_2O_3膜系后,透过率有明显提高.Y_2O_3膜系是性能优异的金刚石红外光学材料增透膜.
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| 关 键 词： | 金刚石 氧化钇 薄膜 射频磁控反应溅射 增透 红外透过率 设计 |
Design and study of antireflective yttria films coated on diamond |
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| LIU Qi-jun,LIU Zheng-tang,YAN Feng.Design and study of antireflective yttria films coated on diamond[J].Electroplating & Finishing,2009,28(12). |
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| Authors: | LIU Qi-jun LIU Zheng-tang YAN Feng |
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| Abstract: | The antireflection of thin film was designed based on fundamental theories of optical interference coating to improve the infrared transmission of diamond. Some related parameters of the antireflective films were obtained. The antireflection effect was analyzed by the exhaustion method in inhomogeneous design for all thin films designed. The results showed that the transmission of diamond substrate coated with Y2O3 films on one or both sides were evidently increased. Y2O3 films can be used to fabricate exce... |
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| Keywords: | diamond yttria thin film radio frequency magnetron reactive sputtering antireflective infrared transmittance design |
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