硅表面十六烯薄膜的制备与表征

利用机械与化学结合的方法实现了硅基底上的可控自组装（“割草种花”思想），为纳米尺度结构的构筑提供了一定的实验基础．基于金刚石刀具切削的自组装加工技术，在氢终止的硅表面上制备了十六烯自纽装单分子膜，并利用原子力显微镜（AFM）和X射线光电子能谱（XPS）对自组装膜进行了检测和表征，证明这种方法能够方便快捷地实现硅基底上的可控自组装；并用AFM检测了十六烯薄膜的黏着力，分析了可能导致其变化的原因，根据黏着力的变化也说明切削区域生成了自组装膜。

Preparation and Characterization of 1-Hexadecene Thin Film on Silicon Surface

Controllable self-assembly on silicon surface was carried out with a mechanical and chemical combined method, which provided an experimental basis for fabricating nano-structure. 1-Hexadecene self-assembled monolayer （SAM） was fabricated on hydrogen-terminated silicon surface by the self-assembly technology based on the cutting of diamond tool. X-ray photoelectron spectroscopy（XPS） as well as atomic force microscopy （AFM） was utilized to detect and characterize the self-assembled monolayer. It is proved that controllable self-assembly on silicon surface can be realized quickly and conveniently with this method. The adhesion force of the SAM was characterized by AFM, and the factor attributed to the change was analyzed. It also shows that the SAM is formed on the cutting area according to the change of adhesion force.