A model for preventive maintenance operations and forecasting |
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Authors: | D Daniel Sheu Jun Yuan Kuo |
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Affiliation: | (1) Department of Industrial Engineering & Engineering Management, National Tsing Hua University, Hsinchu, 30013, R.O.C. Taiwan |
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Abstract: | Equipment costs constitute the greatest majority of overall costs for semiconductor manufacturing. Therefore, maintaining
high equipment availability has been regarded as one of the major goals in the industry. The ability to forecast correctly
equipment preventive maintenance (PM) timing requirements not only can help optimizing equipment uptime but also minimizing
negative impacts on manufacturing production efficiency. This research used grey theory and evaluation diagnosis to construct
a PM forecasting model for prediction of PM timing of various machines. The results showed significant improvements of PM
timing predictions compared to the existing method based on experience and an alternative method proposed by Li and Chang
(Semiconductor Manufacturing Technology Workshop 2002: 10–11, pp. 275–277) for the same fab cases.
Received: June 2005 / Accepted: December 2005 |
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Keywords: | Preventive maintenance forecast Grey forecast theory Wafer manufacture Equipment maintenance semiconductor manufacturing |
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