| 激光干涉微轮廓测量仪 |
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| 引用本文： | 宋康,赵玉龙,蒋庄德. 激光干涉微轮廓测量仪[J]. 光学精密工程, 2003, 11(3): 245-249 |
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| 作者姓名： | 宋康 赵玉龙 蒋庄德 |
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| 作者单位： | 西安交通大学,机械工程学院,陕西,西安,710049 |
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| 基金项目： | 2 0 0 0年教育部科学技术研究重点资助项目(No .0 0 117) |
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| 摘 要： | 基于Michelson干涉仪测量原理研制的微轮廓测量仪,载物平台采用步进电机和压电陶瓷(PZT)两级闭环驱动与定位,步进电机用于快速粗定位和扩大测量范围,压电陶瓷用于精密定位,重复定位精度为10 nm;测量光路采用共干涉系统,对机械振动,温度漂移不敏感;测量范围20 mm×20 mm×0.4 mm,纵向分辨率为0.32 μm,横向分辨率为0.5μm.
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| 关 键 词： | 微轮廓测量仪 压电陶瓷 激光干涉 |
| 文章编号： | 1004-924X(2003)03-0245-05 |
| 收稿时间： | 2003-02-24 |
| 修稿时间： | 2003-02-24 |
Laser profilometer |
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| SONG Kang,ZHAO Yu long,JIANG Zhuang de. Laser profilometer[J]. Optics and Precision Engineering, 2003, 11(3): 245-249 |
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| Authors: | SONG Kang ZHAO Yu long JIANG Zhuang de |
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| Affiliation: | School of Mechanical Engineering, Xi′an Jiaotong University, Xi′an 710049, China |
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| Abstract: | The laser profilometer based on the Michelson interferometry principle, has its platform driven by a stepper motor for fast rough position and expansion of measuring range, and by piezoelectric ceramic for precision positioning with a repetitive positioning accuracy of 10 nm. A common path interference system, which is not sensitive to mechanical vibration and temperature drift, is used in the measuring optical path. The laser profilometer has a measuring range of 20 mm×20 mm×0.4 mm, a longitudinal resolution of 0.32 μm, and a lateral resolution of 0.5 μm. |
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| Keywords: | profilometer piezoelectric ceramic laser interferometry |
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