A treatment of diffusion errors affecting junction depth

An error treatment of the diffusion variables of time t, temperature T, and starting resistivity ρ, has been made in regard to their effects upon junction depth. An analytical equation has been derived for engineering usage in determining the per cent error in junction depthx: Per cent error in junction depth =100 sqrt{frac{bar{Δt^{2}}{2t}} +frac{bar{QΔT}^{2}}{2RT^{2}}+bar{frac{sqrt{pi DT}}{microq p^{2}N_{s}x}. Delta rho exp (x^{2}/4Dt)}}A sample calculation using the above equation is presented along with a method of estimating errors in junction depth due to heating and cooling in the diffusion cycle.