Microstructure and properties of (Sr, Ca)CuO2/(Sr, Ca)RuO3 multilayers

Epitaxial multilayer thin films of infinite-layer (Sr, Ca)CuO₂ and perovskite (Sr, Ca)RuO₃ have been prepared on (100) SrTiO₃ substrates by multitarget rf magnetron sputtering. X-ray diffraction analyses revealed that the multilayer structure of (Sr, Ca)CuO₃/(Sr, Ca)RuO₃ was successfully fabricated with a minimum layer thickness of 20 Å. Transmission electron microscopy measurements of the multilayers indicated that there was no dislocation which normally exists in single-layer films with an infinite-layer structure. Resistivities of multilayer films at room temperature ranged from 1 to 10 m cm and showed semiconductor-like dependence against the temperature.