| MEMS耦合场分析与系统级仿真 |
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| 引用本文： | 孙道恒.MEMS耦合场分析与系统级仿真[J].中国机械工程,2002,13(9):765-768. |
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| 作者姓名： | 孙道恒 |
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| 作者单位： | 厦门大学，福建省厦门市，361005 |
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| 基金项目： | 教育部高等学校骨干教师计划资助项目 |
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| 摘 要： | 微机电系统的计算机辅助设计是MEMS真正走向市场的重要基础。耦合场分析与系统级仿真是MEMSCAD中2个最关键的环节。概括了MEMSCAD的体系结构；综述了耦合场计算的常用数值方法及应用范围；着重介绍了适合于MEMS系统级仿真的2个基本模型的基本思想、构造方法，分析了各自的优缺点，指出今后有待继续研究的几个问题。
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| 关 键 词： | 微机电系统 多场耦合 系统级仿真 CAD |
| 文章编号： | 1004-132X(2002)09-0765-04 |
Coupled-Field Analysis and System Level Simulation on MEMS |
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| Sun Daoheng.Coupled-Field Analysis and System Level Simulation on MEMS[J].China Mechanical Engineering,2002,13(9):765-768. |
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| Authors: | Sun Daoheng |
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| Abstract: | CAD of MEMS is as the key foundation when MEMS is going toward market. Coupled-field analysis and the system level simulation are of most importance in MEMS CAD. In the paper, the schematic architecture of MEMS CAD, the numerical methods used frequently and application domains of coupled-field computation are summarized. The basic ideas and construction methods of two system level simulation models adapted to MEMS are introduced in detail. The ongoing research problems are pointed out as well. |
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| Keywords: | micro-electro-mechanical system(MEMS) coupled-field system level simulation CAD |
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