双光楔微扫描哈特曼-夏克波前探测技术

传统哈特曼-夏克传感器主要受微透镜尺寸与微透镜数量的限制,对待测波前采样不足,影响对波前的探测精度。通过对哈特曼-夏克传感器波前重构原理和双光楔微扫描原理进行分析讨论,提出了一种在哈特曼-夏克传感器之前加入双光楔微扫描结构的检测方法,弥补了传统哈特曼-夏克传感器对待测波前采样不足的缺点。利用Zemax和Lighttools软件模拟了加入双光楔微扫描结构哈特曼-夏克传感器的光斑分布情况。微扫描图像重建算法与波前重构算法结合给出原理性验证,对所模拟后大像差光学系统波前复原精度提高了53.53%,该方法可以有效提高哈特曼-夏克传感器对波前探测的精度。

Hartmann-Shack sensor with dual-wedge micro-scanning in wavefront detection technology

The Hartmann-Shack sensor is mainly affected by the dimension and the number of lenticule. Thus the measured wavefront has been inadequate sampled and affected the precision of wavefront. The wavefront reproduction principle of Hartmann sensor and dual-wedges micro-scanning technology were analyzed and disscussed. A new detected method was proposed, which added the structure of dual-wedges micro-scanning. The method can compensate the shortcoming of lacking sample with measured wavefront in the traditional Hartmann sensor. By utilizing Zemax and Lighttools software, spot distribution was simulated by Hartmann sensor of adding dual-wedge micro-scanning structure. Combined with micro-scanning image of reconfiguration algorithm with the wavefront reconstruction algorithm, the principle was verified. The wavefront reconstruction of large aberration by simulation was improved 53.53% in the optical system. Conclusions show that the method can effectively increase the accuracy of wavefront detection by Hartmann sensor with dual-wedge.