椭圆缺陷轮廓的成品率估计

现有成品率及关键面积估计模型中。假定缺陷轮廓为圆。而70％的实际缺陷轮廓接近于椭圆．提出了椭圆缺陷轮廓的成品率模型，该模型与圆模型相比更具有一般性．而圆模型轮廓的成品率模型仅为新模型的特例．比较了新模型与真实缺陷及其圆模型引起的成品率损失。表明新模型在成品率估计方面更加精确．

Estimation of yield associated with elliptical defect

In integrated circuits, the defects associated with photolithography are assumed to be the shape of circular discs in order to perform the estimation of yield and fault analysis. However, the shape of 70% real defects approximates elliptical shapes. This paper provides a yield model caused by elliptical defects. The model is more general than that of the circular defect as the model is only an instance of the new model. A comparison result between the two models in experiment shows that the new model may predict the yield caused by real defects more accurately than the circular model does, which is of significance for the prediction and improvement of the yield.