| 传感器芯片系统研究与应用 |
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| 引用本文： | 夏善红,边超,孙楫舟,陈贤祥,彭春荣,董汉鹏,陈庆永,佟建华,郑凤杰,张虹.传感器芯片系统研究与应用[J].仪表技术与传感器,2009(Z1). |
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| 作者姓名： | 夏善红 边超 孙楫舟 陈贤祥 彭春荣 董汉鹏 陈庆永 佟建华 郑凤杰 张虹 |
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| 作者单位： | 中国科学院电子学研究所传感技术联合国家重点实验室北方基地,北京,100190 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划)，国家重点基础研究发展规划(973计划) |
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| 摘 要： | 基于微纳制造、微电子等技术的传感器芯片系统具有体积小、质量轻、功耗低、易于批量化生产、成本低、易于集成化等优点,是传感技术领域的一个重要研究方向.近年来相关的研究主要包括微纳传感器芯片、微传感器阵列、多传感器集成芯片系统、传感器与电路集成芯片系统、微流控芯片系统、无线网络传感器节点芯片系统等.文中分别以糖化血红蛋白免疫传感器、催化燃烧气体传感器和电场传感器为例,简要介绍若干典型的生物量、化学量和物理量微传感器系统及其应用.
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| 关 键 词： | 微型 传感器 芯片系统 |
Research and Application of Microsensor System-on-Chip |
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| XIA Shan-hong,BIAN Chao,SUN Ji-zhou,CHEN Xian-xiang,PENG Chun-rong,DONG Han-peng,CHEN Qing-yong,TONG Jian-hua,ZHENG Feng-jie,ZHANG Hong.Research and Application of Microsensor System-on-Chip[J].Instrument Technique and Sensor,2009(Z1). |
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| Authors: | XIA Shan-hong BIAN Chao SUN Ji-zhou CHEN Xian-xiang PENG Chun-rong DONG Han-peng CHEN Qing-yong TONG Jian-hua ZHENG Feng-jie ZHANG Hong |
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| Abstract: | Based on micro/nano fabrication and microelectronic technologies, microsensors and microsystems have become one of the most important research areas due to their advantages of small-size, light-weight, low-power consumption, low-cost, and ease of batch fabrication and integration. In recent years, researches in the relevant fields mainly focus on micro/nano sensor chips, micro-sensor arrays, multi-sensor integrated microsystems, sensor-circuit integrated microsystems, microfuidic systems, and wireless network microsensor nodes. In this paper, the hemoglobin A1c immunosensor, micro pellistor and electric field microsensor are taken as examples to briefly demonstrate some typical biological, chemical and physical microsensors and systems as well as their applications |
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| Keywords: | microsensor microsystem immune gas electric field |
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