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Backside Localization of Current Leakage Faults Using Thermal Laser Stimulation |
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| Authors: | R. Desplats F. Beaudoin P. Perdu P. Poirier D. Tremouilles M. Bafleur D. Lewis |
| Affiliation: | 1. University of Würzburg, Germany;2. Nano-Tomography Group, Fraunhofer Development Center X-Ray Technology EZRT, Würzburg, Germany;3. Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Halle (Saale), Germany;4. ON Semiconductor, S. Portland, ME and Gresham, OR, USA;1. School of Microelectronics of Tianjin University, China;2. Product Quality Center, NXP Semiconductors (Tianjin) Limited, China |
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