MEMS高g值加速度计动态线性校准装置设计及试验验证

基于一维应力波传播理论和弹性波叠加原理,设计了双弹头霍普金森杆校准装置,用以实现精确标定高g值加速度计的动态线性参数.利用ANSYS/LS-DYNA有限元仿真软件对双弹头霍普金森杆进行了数值模拟;分析了子弹材料、垫片材料、垫片厚度对加速度激励波形的影响,并结合以上三种因素对内、外弹单独撞击产生的加速度叠加曲线与两弹同时撞击产生的加速度曲线的一致性进行了分析;最终,通过试验验证了双弹头霍普金森杆校准装置测量加速度计动态线性参数的可行性.

The design of Calibration device on Dynamic Linearity of high g MEMS accelerometer and experimental verification

Based on one-dimension stress wave theory and superposition theory of elastic waves,designed a Dual Warhead Hopkinson bar to demarcate the dynamic linear parameters of high g micro accelerometer accurately. A fi-nite element model for Hopkinson bar calibration system was created,ANSYS/LS-DYNA was employed to simulate the operation process of Hopkinson bar,and the effects of the projectile′s materials,adjustment pads materials and thickness on the acceleration waveform were found.And combination of these three factors,we have analyzed the consistency about when two bullets hit Hopkinson bar respectively,produce the superimposed curve and when they impact Hopkinson bar at the same time,produce the curve;ultimately,verifying its feasibility that used calibration device of dual warhead Hopkinson bar to measure dynamic linear parameters of high g micro accelerometer.