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1. Inert gas handling in ion plating systems |
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| Authors: | A.R. Goode M.J. St. Burden |
| Affiliation: | NRDC/Nanotech (Thin Films) Ltd, Sedgley Park Trading Estate, Prestwich, Manchester M25 8WD, UK |
| Abstract: | |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ | |
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