刮板细度计非接触测量数据处理研究

对基于光谱共焦技术搭建的刮板细度计斜槽面深度测量装置的非接触测量数据进行处理算法研究.引入高斯滤波对整段测量数据进行滤波分析,再分左上平面、右上平面、斜槽底面三段进行高斯滤波,分离三个测量面的表面粗糙度信号及波纹度信号,解算出粗糙度值.对于高斯滤波中线,利用最小二乘法进行拟合,结果表明左右上平面的直线倾斜度一致,可拟合...

The process of the Measurement Data of Non-contact Grind-Fineness-Gage Measuring-Device

The processing algorithm of the non-contact measurement data of the fineness of grind gage based on the spectral confocal technology is studied.The Gaussian filter is used to filter and analyze the whole measurement data,and then the Gaussian filtering is carried out in three sections of upper left plane,upper right plane and bottom surface of the chute.The surface roughness signal and waviness signal of the three measuring surfaces are separated and the roughness value is calculated.The least square method is used for Gaussian filter median line.The filtering results show that the inclination of the straight lines on the left and right upper planes are consistent and can be fitted into one straight line.Taking the straight line fitted as the datum line,the depth from the scanning point of the chute surface to the datum line is obtained,and the indicating error of the nominal value of the chute surface depth of 90μm is(0.27~1.97)μm.Compared with the data obtained from the contact measurement of inductance micrometer,the results show that the data processing method for noncontact measurement is feasible and the measurement results are accurate and reliable.