激光干涉仪在气体微小流量测量中的应用

为了提升气体微小流量的校准能力，拓展流量校准范围下限，以被动活塞式玻璃体积管主标准器作为研究对象，提出一种使用激光干涉仪实时测量活塞移动位移从而计算得出标准流量的方法，将流量范围下限从1 mL/min 扩展至0.01 mL/min。开展了流量重复性试验及标准流量不确定度分析，试验结果表明该标准器在扩展的微小流量范围内具有良好计量性能，满足溯源校准要求，实现了微升级微小气体流量校准的技术突破。

Application of Laser Interferometer in the Measurement of Micro Gas Flow

In order to improve the calibration ability of the micro gas flow and expand the lower limit of the flow calibration range, the passive piston glass volume tube master standard was used as the research object, and a method of using a laser interferometer to measure the displacement of the piston in real time to calculate the standard flow was proposed. This method extended the lower limit of the flow range from 1 mL/min to 0.01 mL/min. The research performed flow repeatability test and standard flow uncertainty analysis. The results show that the standard has good measurement performance in the extended micro flow range, meets the traceability calibration requirements, and achieves a technological breakthrough in micro-upgrading micro gas flow calibration.