线性运动平台多自由度几何运动误差测量技术

线性运动平台是精密制造和测量的基础，其定位精度直接影响着制造和测量的精度。由于制造和装配误差的影响，运动平台存在六个自由度的运动误差，将影响运动平台的定位精度。为了提高运动平台的定位精度，需要准确地测量各项运动误差。传统的测量方法只能对单一误差进行测量，并且测量仪器体积较大，无法集成在运动平台中进行实时误差测量。本文提出了一系列成本低、体积小、易集成的高精度多自由度几何运动误差同时测量技术，可以根据测量需求选择测量系统的自由度，在提高测量精度的同时，还可以实现在线测量，为提高线性运动平台运动精度起到重要作用。

Technique of Measuring Multi-degree-of-freedom Geometric Motion Errors of Linear Stages

The machining accuracy of machine tools and the measuring accuracy of measurement instruments are significantly influenced by the positioning accuracy of linear stages, which are the basic components of the machine tool and the measurement instrument. Since there are the manufacturing error and the assemble error, the linear stage exists six-degree-of-freedom geometric motion errors, which will affect its positioning accuracy. It is essential to measure the geometric motion errors for compensating the positioning errors of the linear stage induced by the geometric motion errors. The traditional measurement method can only measure a single error element, which is time-consuming. In addition, the size of the traditional measurement instrument is bulky and cannot realize on-line geometric motion errors measurement. Therefore, a series of compact and low-cost multi-degree-of-freedom geometric motion errors measurement method are proposed in this paper. The degree-of-freedom of the measurement system can be selected according to the requirement of the measurement. The measurement systems can not only realize high-precision measurement, but also achieve on-line measurement. Multi-degree-of-freedom geometric motion errors measurement methods play an important role in improving the motion accuracy of linear stages.