石墨烯谐振式微质量传感器研究进展

微质量传感器可以用于毒害气体，纳米颗粒的检测，被广泛用于环境检测，医疗诊断等领域。近年来，基于石墨烯材料的微质量传感器因为其大的表面积体积比，低电子噪声，及优异的吸附性被广泛研究。本文针对一类基于谐振原理的超高灵敏度石墨烯微质量传感器展开综述，重点论述了石墨烯谐振器的结构，激振拾振方案，质量敏感特性等问题，总结了关于石墨烯谐振式微质量检测的进展及挑战。

Graphene-Based Resonators for Micro-Mass Sensing

Micro-mass sensors can be used for the detection of poisonous gases and nanoparticles, which are widely used in environmental detection, medical diagnosis and other fields. In the past few years, micro-mass sensors based on graphene materials have been extensively studied because of their large surface area to volume ratio, low electronic noise, and excellent adsorption. This article focuses on a kind of ultra-high-sensitivity graphene micro-mass sensor based on the principle of resonance, focusing on the structure of graphene resonators, vibration pick-up schemes, quality sensitivity characteristics and other issues, and summarizes the graphene resonance micro-mass detection progress and challenges.